Publications
B. Tang and K. Sato, Formation of Silicon Nano Tips in Surfactant-Modified Wet Anisotropic Etching, Appl. Phys. Express, vol.4 no.5, #056501 (2011).
Prem Pal, K. Sato, M.A Gosalvez, B. Tang, H. Hida and M. Shikida, Fabrication of movel microstructures based on orientation-dependent adsorption of surfactant molecules om a TMAH solution, Journal of Micromechanics and Microengineering, vol.21 no.1, #015008 (2011).
B. Tang, M. Shikida, K. Sato, Prem Pal, H. Amakawa, H. Hida and K. Fukuzawa, Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining, Journal of Micromechanics and Microengineering, vol.20 no.6, #65008 (2010).
M.A. Gosalvez, Prem Pal, B. Tang and K. Sato, Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions, Sensors and Actuators A, vol.157, 91-95 (2010).
B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, H. Amakawa and S. Itoh, Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH, Sensors and Actuators A, vol.156-2, 334-341 (2009).
M.A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura and K. Ishibashi, Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications, Journal of Micromechanics and Microengineering, vol.19 no.12, #125011 (2009).
Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano, H. Hida, B. Tang and S. Itoh, Surfactant adsorption on single crystal silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by in-situ infra-red spectroscopy, IEEE Journal of Microelectromechanical Systems, vol.18 no.6, 1345-1356 (2009).
